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Physical analysis of gate oxide breakdown in nanoelectronics


by Prof. Pey Kin Leong  

the Singapore University of Technology and Design

      How can a metal-oxide-semiconductor (MOS) transistor suffered from multiple dielectric breakdowns with severe structural damages (e.g., local melting and metal migration) remain functional? In this talk, I would share with you various breakdown related defects in nanoscale transistors used in state-of-the-art computer chips and mobile devices. It is amazing to realize that even a transistor has suffered a catastrophic failure, it can still be functional with degraded performance. I will show the first time a real-time physical analysis of a breakdown in an ultrathin dielectric of less than a few nanometers (1 nm = 10-9 m).







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