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The coarse adjustment range:2.5 mm in the XY direction and 1.5 mm in the Z direction;
The fine adjustment range:18 um in the XY direction and 1.5 um in the Z direction;
Fine adjustment resolution：0.4 nm in XY direction, 0.04 nm in Z direction;
Current measurement range：1nA-30 mA;
Current measurement resolution：better than 100 fA;
Voltage output range：±10 V in normal mode;
±150 V in high voltage mode;
I-V measurement, I-t measurement.
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