The Thermo Scientific Helios 5 DualBeam
redefines the standard in sample preparation and three-dimensional characterization through the most
advanced focused ion and electron beam performance, exclusive software, and an unprecedented level of automation and
ease-of-use.
Main Specifications:
Electron beam resolution(At optimum WD)
– 0.6 nm at 30 kV STEM
– 0.6 nm at 15 kV
– 1.0 nm at 1 kV
– 0.9 nm at 1 kV with beam deceleration
Ion optics
– Ion beam current range: 1 pA – 100 nA
– Accelerating voltage range: 500 V – 30 kV
Flexible 5-axis motorized stage
– XY range: 110 mm
– Z range: 65 mm
– Rotation: 360° (endless)
– Tilt range: -15° to +90°
– Max sample height: Clearance 85 mm to eucentric point
– Max sample size: 110 mm with full rotation (larger samples
possible with limited rotation)
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