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Temperature range：RT-1000℃;
Heating and cooling rate：5°C/S;
Under high temperature (1000℃) and high pressure (1 atm) pressure, the chip will not be damaged if it continues to work for more than 24 hours;
Gas input: 3 gases - 2 reactive gases and 1 purge gas
Gas flow rate: 0.005 mL/min - 1.000 mL/min;
Gas mixing ratio: 1%-99%;
Independent adjustment of air pressure and gas flow rate: 0.005mL/min under 1Bar.
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